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Art
J-GLOBAL ID:201602011479876702   Reference number:68A0034533

Der dielektrische Durchschlag in SiO2-Schichten auf Silizium.

けい素の上のSiO2膜の誘電破壊
Author (1):
Material:
Volume: 24  Issue:Page: 48-52  Publication year: 1967
JST Material Number: E0428A  ISSN: 0044-2283  CODEN: ZAPHA   Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU) 
Terms in the title (3):
Terms in the title
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