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J-GLOBAL ID：201602015726805398   Reference number：73A0035021

Fundamentals of ion plating.

イオンプレーティングの基礎
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Author (1)：
MATTOX D M

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Material：
J Vac Sci Technol  (Journal of Vacuum Science & Technology)

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Volume： 10  Issue： 1  Page： 47-52  Publication year： 1973 
JST Material Number： C0789A  ISSN： 0022-5355  CODEN： JVSTAL  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
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イオンめっき

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イオン照射

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スパッタ

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薄膜作製

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イオンプレーティング

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基礎

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