Art
J-GLOBAL ID:201602020158838158   Reference number:58A0053033

Evaluation of the Surface Concentration of Diffused Layers in Silicon.

シリコン中の拡散層の表面濃度の決定
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Volume: 37  Issue:Page: 699-710  Publication year: 1958 
JST Material Number: B0062A  ISSN: 0005-8580  Document type: Article
Country of issue: United States (USA) 
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