Art

J-GLOBAL ID：201602211404425052   Reference number：16A0920763

Orientation control of SrRuO₃ thin film on a Si substrate by chemical solution deposition for an electrode of lead zirconate titanate thin films

ジルコン酸チタン酸鉛薄膜電極のための化学溶液堆積によるSi基板上のSrRuO₃薄膜の方位制御

Author (9)： Ohno Tomoya (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Fukumitsu Kentaroh (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Honda Takamasa (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Hirai Shigeto (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Arai Takashi (Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Hamamatsu, Shizuoka 432-8561, Japan) ,  Sakamoto Naonori (Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Hamamatsu, Shizuoka 432-8561, Japan) ,  Wakiya Naoki (Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Hamamatsu, Shizuoka 432-8561, Japan) ,  Suzuki Hisao (Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Hamamatsu, Shizuoka 432-8561, Japan) ,  Matsuda Takeshi (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan)
Material： Materials Letters  (Mater Lett)
Volume： 181  Page： 74-77  Publication year： Oct. 15, 2016 
JST Material Number： E0935A  ISSN： 0167-577X  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *thin film ,  substrate(plate) ,  silicon ,  *strontium compound ,  *ruthenium compound ,  *oxoate ,  oxide ,  lanthanum compound ,  cobalt compound ,  nickel compound ,  *lead zirconate titanate ,  preferred orientation ,  *residual polarization ,  constant ,  *piezoelectricity ,  solution growth ,  thin film growth ,  *membrane electrode
Semi thesaurus term： PZT ,  ハイブリッド薄膜 ,  strontium ruthenate ,  piezoelectric constant ,  Chemical solution deposition ,  film electrode

Author keywords (5)： Crystal growth ,  Electroceramics ,  Multilayer structure ,  Sol-gel preparation ,  Thin films

JST classification (2)： Oxide thin films  (BK14050P) ,  Piezoelectricity,pyroelectricity,electret  (BM05040M)

Terms in the title (6)： ジルコン酸チタン酸鉛 ,  薄膜電極 ,  化学溶液堆積 ,  Si基板 ,  薄膜 ,  方位制御