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J-GLOBAL ID：201602233077952713   Reference number：16A0942073

大気圧ペン型プラズマによるDLCの局所成膜

Author (3)：
YOSHIKI HIROYUKI

About YOSHIKI HIROYUKI

(鶴岡工高専)

About 鶴岡工高専

, 
SAGAI YUUMA

About SAGAI YUUMA

(鶴岡工高専)

About 鶴岡工高専

, 
SAGAI YUUMA

About SAGAI YUUMA

(オリックス・ファシリテ)

About オリックス・ファシリテ


Material：
応用物理学会秋季学術講演会講演予稿集(CD-ROM)  (Extended Abstracts. JSAP Autumn Meeting (CD-ROM))

About 応用物理学会秋季学術講演会講演予稿集(CD-ROM)


Volume： 77th  Page： ROMBUNNO.15p-P6-15  Publication year： Sep. 01, 2016 
JST Material Number： Y0055B  ISSN： 2758-4704  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*plasma source

About plasma source

, 
*plasma treatment

About plasma treatment

, 
thin film growth

About thin film growth

, 
*diamond-like carbon

About diamond-like carbon

, 
locality

About locality


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
大気圧ペン型プラズマ

About 大気圧ペン型プラズマ

, 
atmospheric pressure plasma

About atmospheric pressure plasma


JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma 
(BJ02110K)

About Applications of plasma

,  Plasma devices 
(BJ02082I)

About Plasma devices

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
大気圧

About 大気圧

, 
ペン

About ペン

, 
プラズマ

About プラズマ

, 
DLC

About DLC

, 
成膜

About 成膜


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