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J-GLOBAL ID:201602236908812190   Reference number:16A1216931

Effect of grain boundary character of multicrystalline Si on external and internal (phosphorus) gettering of impurities

不純物の外部/内部(燐)ゲッタリングに及ぼす多結晶Siの結晶粒界特性の影響
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Volume: 24  Issue: 12  Page: 1615-1625  Publication year: Dec. 2016 
JST Material Number: W0463A  ISSN: 1062-7995  CODEN: PPHOED  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Lattice defects in semiconductors 
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