About Hirata Yuki
About Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
About Choi Junho
About Department of Mechanical Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
About Journal of Applied Physics
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About carbon material
About hydrogenation
About micro channel
About pore
About internal surface
About evaporated film
About aspect ratio
About ion implantation
About film thickness
About semiconductor thin film
About amorphous carbon
About inner surface
About plasma ion implantation
About Semiconductor thin films
About 高アスペクト比
About マイクロチャネル
About 内側表面
About 蒸着