Tribological behavior of O<sub>2</sub> and CF<sub>4</sub> plasma post-treated diamond-like carbon films under dry air and in a high relative humidity environment

Jongwannasiri C.; Watanabe S.

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J-GLOBAL ID：201602242083520462 Reference number：16A1132305

Tribological behavior of O₂ and CF₄ plasma post-treated diamond-like carbon films under dry air and in a high relative humidity environment

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Volume： 306 Issue： PA Page： 200-204 Publication year： 2016
JST Material Number： D0205C ISSN： 0257-8972 Document type： Article
Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Tribological behavior of O2 and CF4 plasma post-treated diamond-like carbon films under dry air and in a high relative humidity environment

Tribological behavior of O₂ and CF₄ plasma post-treated diamond-like carbon films under dry air and in a high relative humidity environment