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J-GLOBAL ID：201702217774422894   Reference number：17A0995900

Deposition of PMDA-TFDB type polyimide onto microscale trenches patterned on silicon wafer using supercritical carbon dioxide

超臨界二酸化炭素を用いたシリコンウエハ上にパターン化されたマイクロスケール溝へのPMDA TFDB型ポリイミドの蒸着【Powered by NICT】

Author (5)： Haruki Masashi (Faculty of Mechanical Engineering, Institute of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan) ,  Wasada Atsuhiko (Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima 739-8527, Japan) ,  Hosokawa Yuki (Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima 739-8527, Japan) ,  Kihara Shin-ichi (Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima 739-8527, Japan) ,  Takishima Shigeki (Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima 739-8527, Japan)
Material： Journal of Supercritical Fluids  (J Supercrit Fluid)
Volume： 127  Page： 200-207  Publication year： 2017 
JST Material Number： W1591A  ISSN： 0896-8446  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Reactivities of two polyimide ...

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Thesaurus term： growth rate ,  precursor(substance) ,  *supercritical carbon dioxide ,  *vapor deposition ,  reactivity ,  monomer ,  phase transition ,  *pattern formation ,  fluorination
Semi thesaurus term： *マイクロスケール ,  *シリコンウエハ , 【Automatic Indexing@JST】

Author keywords (5)： Polyimide ,  Deposition ,  PMDA ,  TFDB ,  Supercritical carbon dioxide

JST classification (2)： Chemical reaction engineering,chemical kinetics  (XE01020M) ,  Enzyme in general  (EB09010D)

Terms in the title (6)： 超臨界二酸化炭素 ,  シリコンウエハ ,  マイクロスケール ,  PMDA ,  ポリイミド ,  蒸着