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J-GLOBAL ID:201702218013781033   Reference number:17A1456439

Removal model of rotation & revolution type polishing method

回転と回転型研磨法の除去モデル【Powered by NICT】
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Volume: 50  Page: 515-521  Publication year: 2017 
JST Material Number: A0734B  ISSN: 0141-6359  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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This paper introduces and disc...
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Special machining  ,  Manufacturing technology of solid-state devices  ,  Milling  ,  Cutting in general 
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