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J-GLOBAL ID：201702223364463074   Reference number：17A0856788

Varifocal Scanner Using Wafer Bonding

ウエハボンディングを用いた可変焦点スキャナ【Powered by NICT】
Author (6)：
Nakazawa Kenta

About Nakazawa Kenta

(Graduate School of Engineering, Tohoku University, Sendai, Japan)

About Graduate School of Engineering, Tohoku University, Sendai, Japan

, 
Sasaki Takashi

About Sasaki Takashi

(Graduate School of Engineering, Tohoku University, Sendai, Japan)

About Graduate School of Engineering, Tohoku University, Sendai, Japan

, 
Furuta Hiromasa

About Furuta Hiromasa

(Research and Development Center, Panasonic Industrial Devices SUNX Co., Ltd., Kasugai, Japan)

About Research and Development Center, Panasonic Industrial Devices SUNX Co., Ltd., Kasugai, Japan

, 
Kamiya Jiro

About Kamiya Jiro

(Research and Development Center, Panasonic Industrial Devices SUNX Co., Ltd., Kasugai, Japan)

About Research and Development Center, Panasonic Industrial Devices SUNX Co., Ltd., Kasugai, Japan

, 
Kamiya Toshikazu

About Kamiya Toshikazu

(Research and Development Center, Panasonic Industrial Devices SUNX Co., Ltd., Kasugai, Japan)

About Research and Development Center, Panasonic Industrial Devices SUNX Co., Ltd., Kasugai, Japan

, 
Hane Kazuhiro

About Hane Kazuhiro

(Graduate School of Engineering, Tohoku University, Sendai, Japan)

About Graduate School of Engineering, Tohoku University, Sendai, Japan


Material：
Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)

About Journal of Microelectromechanical Systems


Volume： 26  Issue： 2  Page： 440-447  Publication year： 2017 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
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Japanese summary of the article(about several hundred characters).
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Thesaurus term：
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
integral

About integral

, 
frequency (Hz)

About frequency (Hz)

, 
*scanner

About scanner

, 
single crystal

About single crystal

, 
resonance frequency

About resonance frequency

, 
silicon

About silicon

, 
COM

About COM


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
交差指電極

About 交差指電極

, 
*ウエハボンディング

About ウエハボンディング

, 【Automatic Indexing@JST】
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
ウエハボンディング

About ウエハボンディング

, 
可変焦点

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, 
スキャナ

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