Art
J-GLOBAL ID:201702225475683964   Reference number:17A0359181

Accumulation of Impurity Carbon and Quantitative Evaluation of Sputtering Particles on PFMs

PFM(プラズマ対向材料)上の不純物炭素の蓄積およびスパッタリング粒子の定量的評価
Author (10):
Material:
Volume: 2015-2016  Page: 290  Publication year: Oct. 2016 
JST Material Number: J0552A  ISSN: 0917-1185  Document type: Article
Country of issue: Japan (JPN)  Language: ENGLISH (EN)

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