Art
J-GLOBAL ID：201702233802722078   Reference number：17A1406914

Confocal laser displacement sensor using a micro-machined varifocal mirror

マイクロ加工された可変焦点反射鏡を用いた共焦点レーザ変位センサ
Author (7)：
NAKAZAWA Kenta

About NAKAZAWA Kenta

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
SASAKI Takashi

About SASAKI Takashi

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
FURUTA Hiromasa

About FURUTA Hiromasa

(Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN)

About Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN

, 
KAMIYA Jiro

About KAMIYA Jiro

(Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN)

About Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN

, 
SASAKI Hideki

About SASAKI Hideki

(Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN)

About Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN

, 
KAMIYA Toshikazu

About KAMIYA Toshikazu

(Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN)

About Panasonic Industrial Devices SUNX Co., Ltd, Kasugai, JPN

, 
HANE Kazuhiro

About HANE Kazuhiro

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
Applied Optics  (Lasers, Photonics, and Environmental Optics)

About Applied Optics


Volume： 56  Issue： 24  Page： 6911-6916  Publication year： Aug. 20, 2017 
JST Material Number： B0026B  ISSN： 1559-128X  CODEN： APOPAI  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
focal point

About focal point

, 
variability

About variability

, 
micromachining

About micromachining

, 
*optical sensor

About optical sensor

, 
*reflecting mirror

About reflecting mirror

, 
*displacement measurement

About displacement measurement

, 
silicon

About silicon

, 
single crystal

About single crystal

, 
focal length

About focal length

, 
linearity

About linearity

, 
miniaturization

About miniaturization


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*laser sensor

About laser sensor

, 
variable focus

About variable focus

, 
confocal

About confocal

, 
monocrystal silicon

About monocrystal silicon

, 
*displacement sensor

About displacement sensor


JST classification (2)：
JST classification
Category name(code) classified by JST.
Other optical devices 
(BD06060O)

About Other optical devices

,  Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

About Measuring methods and instruments of length,area,cross section,volume,angle

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
マイクロ加工

About マイクロ加工

, 
可変焦点

About 可変焦点

, 
反射鏡

About 反射鏡

, 
共焦点

About 共焦点

, 
レーザ

About レーザ

, 
変位センサ

About 変位センサ


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