Art
J-GLOBAL ID：201702235694141481   Reference number：17A0534902

Big data analysis platform for semiconductor manufacturing

半導体製造向けの大データ解析プラットフォーム【JST・京大機械翻訳】
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Author (5)：
Yang Jungang

About Yang Jungang

(School of Mechanical Engineering,Shanghai Jiaotong University)

About School of Mechanical Engineering,Shanghai Jiaotong University

, 
Zhang Jie

About Zhang Jie

(School of Mechanical Engineering,Shanghai Jiaotong University)

About School of Mechanical Engineering,Shanghai Jiaotong University

, 
Qin Wei

About Qin Wei

(School of Mechanical Engineering,Shanghai Jiaotong University)

About School of Mechanical Engineering,Shanghai Jiaotong University

, 
Zhang Qihua

About Zhang Qihua

(Semiconductor Manufacturing International Corporation)

About Semiconductor Manufacturing International Corporation

, 
Kang Sheng

About Kang Sheng

(Semiconductor Manufacturing International Corporation)

About Semiconductor Manufacturing International Corporation


Material：
Jisuanji Jicheng Zhizao Xitong  (Computer Integrated Manufacturing Systems)

About Jisuanji Jicheng Zhizao Xitong


Volume： 22  Issue： 12  Page： 2900-2910  Publication year： 2016 
JST Material Number： C2700A  ISSN： 1006-5911  CODEN： JJZXFN  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
pretreatment

About pretreatment

, 
*data analysis

About data analysis

, 
application program

About application program

, 
semiconductor process

About semiconductor process

, 
screening (inspection)

About screening (inspection)

, 
data warehouse

About data warehouse

, 
system architecture

About system architecture

, 
reuse

About reuse

, 
standardization

About standardization

, 
algorithm

About algorithm

, 
performance test

About performance test

, 
modification

About modification


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
解析アルゴリズム

About 解析アルゴリズム

, 
データストリーム

About データストリーム

, 
大規模データ

About 大規模データ

, 
*半導体製造

About 半導体製造

, 【Automatic Indexing@JST】
Author keywords (5)：
big data

About big data

, 
manufacturing process data

About manufacturing process data

, 
semiconductor manufacturing

About semiconductor manufacturing

, 
distributed processing

About distributed processing

, 
Hadoop

About Hadoop

JST classification (1)：
JST classification
Category name(code) classified by JST.
Database systems 
(JD03030U)

About Database systems

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
半導体製造

About 半導体製造

, 
データ解析

About データ解析

, 
プラットフォーム

About プラットフォーム


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