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J-GLOBAL ID：201702239880871890   Reference number：17A0064027

Formation and electrical properties of high conductively doped nanocrystalline silicon embedded in amorphous silicon carbide

非晶質SICに埋め込まれた高導電性ドープケイ素ナノ結晶の調製と電気的性質の研究【JST・京大機械翻訳】

Author (6)： Ji Yang (National Laboratory of Solid State Microstructures,School of Electronic Science and Engineering,Nanjing University) ,  Shan Dan (National Laboratory of Solid State Microstructures,School of Electronic Science and Engineering,Nanjing University) ,  Qian Mingqing (National Laboratory of Solid State Microstructures,School of Electronic Science and Engineering,Nanjing University) ,  Li Wei (National Laboratory of Solid State Microstructures,School of Electronic Science and Engineering,Nanjing University) ,  Xu Jun (National Laboratory of Solid State Microstructures,School of Electronic Science and Engineering,Nanjing University) ,  Chen Kunji (National Laboratory of Solid State Microstructures,School of Electronic Science and Engineering,Nanjing University)
Material： Nanjing Daxue Xuebao. Zirankexue  (Journal of Nanjing University (Natural Sciences))
Volume： 52  Issue： 5  Page： 780-786  Publication year： 2016 
JST Material Number： C2593A  ISSN： 0469-5097  CODEN： NCHPAZ  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： The optical and electrical pro...

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Thesaurus term： conduction band ,  crystallinity ,  *silicon ,  activation energy ,  carrier mobility ,  *nano crystal ,  annealing (heat treatment) ,  optical gap ,  *conductive property ,  phosphorus ,  carrier density ,  dark conduction ,  *doping ,  electrical conductivity
Semi thesaurus term： 光電気 , 【Automatic Indexing@JST】

Author keywords (5)： C/Si ratio ,  nanocrystalline ,  silicon carbide ,  dark conductivity ,  electrical properties

JST classification (2)： Optical properties of condensed matter in general  (BM08010A) ,  Semiconductor thin films  (BK14040E)

Terms in the title (7)： 高導電性 ,  ドープ ,  ケイ素 ,  ナノ結晶 ,  調製 ,  電気的性質 ,  研究