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J-GLOBAL ID:201702241523905426   Reference number:17A1449668

大気圧低温プラズマにより作製したAZO/ZnO膜に対する核生成時スイープ速度の影響

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Material:
Volume: 2017  Page: ROMBUNNO.11-15  Publication year: Sep. 16, 2017 
JST Material Number: L1738B  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Oxide thin films  ,  Techniques and equipment of thin film deposition 
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