About KAJIFUSA HIROYUKI
About 東大 大学院工学系研究科
About KITA KOJI
About 東大 大学院工学系研究科
About 応用物理学会春季学術講演会講演予稿集(CD-ROM)
About silicon carbide
About MOS structure
About oxidation
About thin film growth
About MOSFET
About silicon dioxide
About epitaxy
About oxide film
About defect
About reaction rate
About 4H-SiC
About interface defect
About oxidation rate
About 膜中欠陥
About Lattice defects in semiconductors
About 4H-SiC
About MOS
About 界面特性
About 酸化
About 酸化膜
About 成長
About 界面欠陥
About 過程
About 欠陥
About 差異