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J-GLOBAL ID:201702245161109620   Reference number:17A0678102

光干渉による潤滑膜厚計測

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Volume: 38  Issue:Page: 111-116(J-STAGE)  Publication year: 2017 
JST Material Number: F0940B  ISSN: 0388-5321  Document type: Article
Article type: 文献レビュー  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Mechanical properties of solids in general  ,  Lubrication in general  ,  Interferometry and interferometers 
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