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Art
J-GLOBAL ID：201702246086797332   Reference number：17A0362439

Device to circuit reliability correlations for metal gate/high-k transistors in scaled CMOS technologies

スケーリングされたCMOS技術における金属ゲート/high-kトランジスタのための回路信頼性相関する装置【Powered by NICT】
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Author (1)：
Kerber A.

About Kerber A.

(Reliability Engineering, GLOBALFOUNDRIES Inc., 400 Stone Break Road extension, Malta, NY 12020, USA)

About Reliability Engineering, GLOBALFOUNDRIES Inc., 400 Stone Break Road extension, Malta, NY 12020, USA


Material：
Microelectronics Reliability  (Microelectronics and Reliability)

About Microelectronics Reliability


Volume： 64  Page： 145-151  Publication year： 2016
JST Material Number： C0530A  ISSN： 0026-2714  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Abstract/Point：
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Metal gate/high-k stacks are i...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*reliability(property)

About reliability(property)

, 
*transistor

About transistor

, 
*complementary metal oxide semiconductor

About complementary metal oxide semiconductor


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ゲートスタック

About ゲートスタック

, 
*回路信頼性

About 回路信頼性

, 
*メタルゲート

About メタルゲート

, 
*CMOS技術

About CMOS技術

, 【Automatic Indexing@JST】
Author keywords (8)：
High-k dielectrics

About High-k dielectrics

, 
Metal gate

About Metal gate

, 
BTI

About BTI

, 
TDDB

About TDDB

, 
RTN

About RTN

, 
SRAM

About SRAM

, 
Ring-oscillators

About Ring-oscillators

, 
CMOS

About CMOS

JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
スケーリング

About スケーリング

, 
CMOS技術

About CMOS技術

, 
金属ゲート

About 金属ゲート

, 
トランジスタ

About トランジスタ

, 
回路信頼性

About 回路信頼性

, 
相関

About 相関


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