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Art
J-GLOBAL ID:201702246086797332   Reference number:17A0362439

Device to circuit reliability correlations for metal gate/high-k transistors in scaled CMOS technologies

スケーリングされたCMOS技術における金属ゲート/high-kトランジスタのための回路信頼性相関する装置【Powered by NICT】
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Volume: 64  Page: 145-151  Publication year: 2016
JST Material Number: C0530A  ISSN: 0026-2714  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Metal gate/high-k stacks are i...
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Measurement,testing and reliability of solid-state devices 

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