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J-GLOBAL ID：201702247638260347   Reference number：17A0344260

Effects of temperature and He cumulative damage on Er_2O_3 film phase structure and crystallinity

ER_2O_3薄膜の結晶構造と結晶度に及ぼす温度とHE累積損傷の影響を研究した。【JST・京大機械翻訳】

Author (6)： Shi Yunlong (Department of Physics,Sichuan University) ,  Lao Yuanxia (Key Laboratory for Radiation Physics and Technology of Ministry of Education,Institute of Nuclear Science and Technology,Sichuan University) ,  Wang Ling (Key Laboratory for Radiation Physics and Technology of Ministry of Education,Institute of Nuclear Science and Technology,Sichuan University) ,  Zhang Haibing (Institute of Nuclear Physics and Chemistry,CAEP) ,  Deng Aihong (Department of Physics,Sichuan University) ,  Wang Yuan (Key Laboratory for Radiation Physics and Technology of Ministry of Education,Institute of Nuclear Science and Technology,Sichuan University)
Material： Sichuan Daxue Xuebao. Zirankexueban  (Journal of Sichuan University. Natural Science Edition)
Volume： 53  Issue： 6  Page： 1340-1344  Publication year： 2016 
JST Material Number： C2595A  ISSN： 0490-6756  CODEN： SCTHAO  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Abstract/Point： In this paper,Er_2O_3 films ar...

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Thesaurus term： annealing(heat treatment) ,  high pressure ,  crystallization ,  *thin film ,  monoclinic system ,  *crystal structure ,  bubble ,  X-ray diffraction ,  characterization ,  *crystallinity ,  internal pressure
Semi thesaurus term： 表面形態 ,  電界放出型走査電子顕微鏡 ,  反応性マグネトロンスパッタリング , 【Automatic Indexing@JST】

Author keywords (3)： Er_2O_3 film ,  Phase stable ,  He damage

JST classification (1)： Crystal structure of metal oxides and chalcogenides  (BK07020Y)

Terms in the title (6)： 薄膜 ,  結晶構造 ,  結晶度 ,  He ,  累積損傷 ,  研究