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J-GLOBAL ID：201702248378937859   Reference number：17A0402548

Fabrication of controllable mesh layers above SiNx micro pores with ZnO nanostructures

ZnOナノ構造を用いたSiNx細孔上の制御可能なメッシュ層の作製【Powered by NICT】

Author (11)： Zhao Yue (College of Instrumentation and Electrical Engineering, Jilin University, Changchun, Jilin 130021, China) ,  Zhao Yue (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Ying Cuifeng (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Ying Cuifeng (MOE Key Laboratory of Weak-light Nonlinear Photonics, School of Physics, Nankai University, Tianjin 300071, China) ,  Huang Qimeng (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Deng Yunsheng (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Zhou Daming (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Wang Deqiang (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Lu Wenqiang (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China) ,  Cui Hong-Liang (College of Instrumentation and Electrical Engineering, Jilin University, Changchun, Jilin 130021, China) ,  Cui Hong-Liang (Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China)
Material： Microelectronic Engineering  (Microelectron Eng)
Volume： 169  Page： 43-48  Publication year： 2017
JST Material Number： C0406B  ISSN： 0167-9317  CODEN： MIENEF  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Ultra-long and laterally align...

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Thesaurus term： flow control(process) ,  *pore ,  optimization ,  binding energy ,  *zinc oxide ,  coherence ,  nanorod ,  preferred orientation ,  *nanostructure
Semi thesaurus term： DNA配列 ,  DNA抽出 ,  ナノドット ,  生長パラメータ ,  酸化亜鉛ナノロッド ,  ナノロッドアレイ , 【Automatic Indexing@JST】

Author keywords (6)： ZnO nanorod arrays ,  Without catalysts ,  Sealing ,  SiNx ,  Micropores ,  DNA sequencing

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (5)： ZnO ,  ナノ構造 ,  細孔 ,  メッシュ ,  作製