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J-GLOBAL ID：201702258063967830
Reference number：17A0922706
Polymer bonding of GaN crystal layer on silicon substrate for micro mechanical resonator applications
マイクロメカニカル共振器応用のためのシリコン基板上へのGaN結晶層のポリマー接合
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Author (3)：
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Material：
Volume：
23
Issue：
7
Page：
2891-2898
Publication year：
Jul. 2017
JST Material Number：
W2056A
ISSN：
0946-7076
Document type：
Article
Article type：
原著論文
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
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Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
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,
JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Resonator
Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
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