Art
J-GLOBAL ID:201702266496895787   Reference number:17A1220901

Ta2O5-based redox memory formed by neutral beam oxidation

中性ビーム酸化によって形成されたTa2O5-ベースの酸化還元メモリ
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Material:
Volume: 55  Issue: 6S1  Page: 06GJ01.1-06GJ01.3  Publication year: Jun. 2016 
JST Material Number: G0520B  ISSN: 0021-4922  CODEN: JJAPB6  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Metal-insulator-metal structures  ,  Oxidation,reduction  ,  Semiconductor integrated circuit 
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