Art
J-GLOBAL ID:201702266850687572   Reference number:17A1906634

Development of Compact Material Testing Machine for Mechanical Characterization of Thin-Film Materials for MEMS

MEMS用薄膜材料の機械特性評価のための小型材料試験機の開発
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Volume:Page: 17-21 (WEB ONLY)  Publication year: Sep. 30, 2017 
JST Material Number: U0770A  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Material testing  ,  Semiconductor thin films  ,  Special machining 
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