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J-GLOBAL ID:201702269036793521   Reference number:17A0367934

Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide

超臨界二酸化炭素を用いたマイクロスケール溝への6FDAとTFDBのふっ素化ポリイミドの蒸着【Powered by NICT】
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Volume: 119  Page: 238-244  Publication year: 2017 
JST Material Number: W1591A  ISSN: 0896-8446  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Fluorinated polyimide (PI) con...
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Chemical reaction engineering,chemical kinetics  ,  Complexes of 9 and 10 groups  ,  Seaweeds  ,  Analysis of drugs  ,  Extraction equilibrium,distribution equilibrium  ,  Preparation of catalysts  ,  Extrusion  ,  Polymer carrier,catalytic reaction  ,  Extraction 

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