Art

J-GLOBAL ID：201702275508669907   Reference number：17A0963993

Surface Layer Analysis of a ²⁸Si-Enriched Sphere Both in Vacuum and in Air by Ellipsometry

偏光解析法による真空及び空気中の両方~28Si濃縮球の表面層解析【Powered by NICT】

Author (5)： Fujita Kazuaki (National Metrology Institute of Japan/National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan) ,  Kuramoto Naoki (National Metrology Institute of Japan/National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan) ,  Azuma Yasushi (National Metrology Institute of Japan/National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan) ,  Mizushima Shigeki (National Metrology Institute of Japan/National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan) ,  Fujii Kenichi (National Metrology Institute of Japan/National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan)
Material： IEEE Transactions on Instrumentation and Measurement  (IEEE Trans Instrum Meas)
Volume： 66  Issue： 6  Page： 1283-1288  Publication year： 2017 
JST Material Number： C0232A  ISSN： 0018-9456  CODEN： IEIMAO  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： For a new definition of the ki...

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Thesaurus term： spherical surface ,  *silicon ,  X-ray photoelectron spectroscopy ,  surface quality ,  *ellipsometry ,  X-ray ,  vacuum vessel ,  *air ,  crystal ,  ellipsometer ,  *surface course ,  uncertainty
Semi thesaurus term： 酸化物層 ,  二層 ,  Avogadro定数 , 【Automatic Indexing@JST】

JST classification (1)： Measuring methods and instruments of mass,density,specific gravity  (AD05030Z)

Terms in the title (6)： 偏光解析法 ,  真空 ,  空気中 ,  濃縮 ,  表面層 ,  解析