About MASADA AYUMI
About SUMCO
About NAKAI TOSHIRO
About SUMCO
About HIROSE RYO
About SUMCO
About SHIGEMATSU SATOSHI
About SUMCO
About KADONO TAKESHI
About SUMCO
About OKUYAMA RYOSUKE
About SUMCO
About KOGA YOSHIHIRO
About SUMCO
About OKUDA HIDEHIKO
About SUMCO
About KURITA KAZUNARI
About SUMCO
About 応用物理学会春季学術講演会講演予稿集(CD-ROM)
About gettering
About adsorption
About epitaxy
About wafer
About silicon
About molecular cluster
About carbon
About secondary ion mass spectrometry
About ion implantation
About iron
About concentration distribution
About temperature dependence
About lattice defect
About capture
About oxygen
About cluster ion
About carbon cluster
About atom trapping
About Irradiational changes semiconductors
About Materials of solid-state devices
About 炭素クラスター
About イオン注入
About Si
About 注入
About 酸素
About 重金属
About ゲッタリング
About 能力