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J-GLOBAL ID：201702281318615728   Reference number：17A0963996

Uniformity Evaluation of Lattice Spacing of 28Si Single Crystals

~28Si単結晶の格子間隔の均一性評価【Powered by NICT】
Author (5)：
Waseda Atsushi

About Waseda Atsushi

(National Metrology Institute of Japan, AIST, Tsukuba, Japan)

About National Metrology Institute of Japan, AIST, Tsukuba, Japan

, 
Fujimoto Hiroyuki

About Fujimoto Hiroyuki

(National Metrology Institute of Japan, AIST, Tsukuba, Japan)

About National Metrology Institute of Japan, AIST, Tsukuba, Japan

, 
Zhang Xiao Wei

About Zhang Xiao Wei

(Institute of High Energy Physics, Chinese Academy of Science, Beijing, China)

About Institute of High Energy Physics, Chinese Academy of Science, Beijing, China

, 
Kuramoto Naoki

About Kuramoto Naoki

(National Metrology Institute of Japan, AIST, Tsukuba, Japan)

About National Metrology Institute of Japan, AIST, Tsukuba, Japan

, 
Fujii Kenichi

About Fujii Kenichi

(National Metrology Institute of Japan, AIST, Tsukuba, Japan)

About National Metrology Institute of Japan, AIST, Tsukuba, Japan


Material：
IEEE Transactions on Instrumentation and Measurement  (IEEE Trans Instrum Meas)

About IEEE Transactions on Instrumentation and Measurement


Volume： 66  Issue： 6  Page： 1304-1308  Publication year： 2017 
JST Material Number： C0232A  ISSN： 0018-9456  CODEN： IEIMAO  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
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The uniformity of the lattice ...
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resolving power

About resolving power

, 
*single crystal

About single crystal

, 
lattice distortion

About lattice distortion

, 
standard deviation

About standard deviation

, 
ingot

About ingot

, 
impurity distribution

About impurity distribution

, 
Avogadro constant

About Avogadro constant

, 
*grating pitch

About grating pitch


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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再評価

About 再評価

, 【Automatic Indexing@JST】
JST classification (3)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of mass,density,specific gravity 
(AD05030Z)

About Measuring methods and instruments of mass,density,specific gravity

,  Interferometry and interferometers 
(BD07070G)

About Interferometry and interferometers

,  Spectroscopy and spectrometers in general 
(BD07041Q)

About Spectroscopy and spectrometers in general

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
格子間隔

About 格子間隔

, 
均一性

About 均一性

, 
評価

About 評価


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