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J-GLOBAL ID：201702283344401372   Reference number：17A1456421

Sub-micrometer scale patterning on single-crystal diamond surface using focused ion beam and deep ultraviolet laser irradiations

集束イオンビームと深紫外レーザ照射を用いた単結晶ダイヤモンド表面上のサブミクロンスケールのパターニング【Powered by NICT】

Author (5)： Kawasegi Noritaka (Central Research Institute, Toyama Industrial Technology Center, 150 Futagami-machi, Takaoka-shi, Toyama 933-0981, Japan) ,  Yamaguchi Makoto (Graduate School of Engineering, Akita University, 1-1 Tegatagakuen-machi, Akita-shi, Akita 010-8502, Japan) ,  Kozu Tomomi (Graduate School of Engineering, Akita University, 1-1 Tegatagakuen-machi, Akita-shi, Akita 010-8502, Japan) ,  Morita Noboru (Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi, Chiba 263-8522, Japan) ,  Nishimura Kazuhito (Faculty of Engineering, Kogakuin University, 2665-1 Nakano-machi, Hachioji-shi, Tokyo 192-0015, Japan)
Material： Precision Engineering  (Precis Eng)
Volume： 50  Page： 337-343  Publication year： 2017 
JST Material Number： A0734B  ISSN： 0141-6359  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： In this study, a novel method ...

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Thesaurus term： surface area ,  concave surface ,  *laser ,  *focused ion beam ,  *pattern formation ,  *laser irradiation ,  *Diamond ,  workability (machining) ,  *single crystal diamond ,  *deep UV ,  *ore ,  *precious stone

Author keywords (7)： Single-crystal diamond ,  Focused ion beam ,  Deep ultraviolet laser ,  Patterning ,  Laser Raman spectroscopy ,  Gallium ,  Heat treatment

JST classification (3)： Cutting in general  (QC02010V) ,  Manufacturing technology of solid-state devices  (NC03030V) ,  Special machining  (QC04000Y)

Terms in the title (5)： 集束イオンビーム ,  深紫外 ,  レーザ照射 ,  単結晶ダイヤモンド ,  パターニング