Art
J-GLOBAL ID:201702288533802540   Reference number:17A1291203

Analysis and Experimental Verification on Deformation of Combined Compliant Structures Driven by Electrostatic Force

静電駆動組合せフレキシブル構造の変形解析と実験検証【JST・京大機械翻訳】
Author (4):
Material:
Issue:Page: 122-126  Publication year: 2017 
JST Material Number: C2449A  ISSN: 1002-1841  Document type: Article
Article type: 原著論文  Country of issue: China (CHN)  Language: CHINESE (ZH)
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According to combined complian...
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Manufacturing technology of solid-state devices  ,  Electrostatic equipment 
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