Toyoda Noriaki

トヨダノリアキ | Toyoda Noriaki

Affiliation and department：

Research field (4)： Manufacturing and production engineering , Quantum beam science , Nanomaterials , Thin-film surfaces and interfaces

Research keywords (4)： nano-fabrication , cluster , surface modification , ion beam

Research theme for competitive and other funds (4)：

2019 - 2022 Cell metabolic activity via non-vacuum ion implantation utilizing an enhanced electric field at a sharpened glass tip
2017 - 2020 Atomic layer etching of transition metal chalcogenide with gas cluster ion beam
2011 - 2014 Damage-free etching of organic materials with mesoscopic cluster beams
2005 - 2006 ガスクラスターイオンビームを用いた超精密3次元形状加工技術の開発

Papers (187)：

Masaya Takeuchi, Satoru Suzuki, Masaki Nakamura, Takashi Hata, Yusuke Nishiuchi, Kaori Tada, Noriaki Toyoda. Highly sensitive electron-beam-induced X-ray detection from liquid using SiNx membrane ultrathinned by gas cluster ion beams. Japanese Journal of Applied Physics. 2024
Masaya Takeuchi, Noriaki Toyoda. Pressure resistance evaluation of an ultrathin SiNx membrane etched by a gas cluster ion beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2024. 550. 165317-165317
Masaya Takeuchi, Reki Fujiwara, Noriaki Toyoda. Atomic layer etching of silicon nitride film by oxygen gas cluster ion beam with acetylacetone. Japanese Journal of Applied Physics. 2023
S. Hanahara, M. Takeuchi, N. Toyoda. Surface preparation of metal films by gas cluster ion beams using organic acid vapor for Cu-Cu bonding. Japanese Journal of Applied Physics. 2022. 61. SF. SF1004-SF1004
豊田紀章. ガスクラスタイオン照射を用いた原子層エッチング. 応用物理. 2021. 90. 4. 239-243

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MISC (44)：

春山雄一, 森本大貴, 部家彰, 住友弘二, 豊田紀章, 伊藤省吾. Selective Etching of Hydrogen-Free Diamond-Like Carbon Films on Atomic Hydrogen Exposure. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2023. 70th
豊田紀章. クラスターイオンビーム励起による表面反応と原子層エッチングへの応用. 光技術コンタクト. 2022. 60. 10. 23
春山雄一, 森本大貴, 部家彰, 住友弘二, 豊田紀章, 伊藤省吾. Dependence on Atomic Hydrogen Exposure for Hydrogen-Free Diamond-like Carbon Films. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2022. 83rd
Naoteru Shigekawa, Hideki Takagi, Masahisa Fujino, Eiji Higurashi, Nobuhiko Nishiyama, Takehito Shimatsu, Noriaki Toyoda. Low Temperature Bonding for 3D Integration FOREWORD. JAPANESE JOURNAL OF APPLIED PHYSICS. 2020. 59
High-Precision Processing with Gas Cluster Ion Beams. 2016. 55-59

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Books (2)：

Lectures and oral presentations (23)：

中性ガスクラスタービームを用いたCu膜のドライALE
(第71回応用物理学会春季学術講演会 2024)
反応性ガス吸着とGCIB照射を用いたエッチングにおける基板冷却効果
(第71回応用物理学会春季学術講演会 2024)
GCIB照射で極薄化した電子線透過窓を用いた液体セルによるSEM/EDS検出の高感度化
(第71回応用物理学会春季学術講演会 2024)
Temperature dependence on metal etching using reactive gas adsorption and GCIB
(44th International Symposium on Dry Process 2023)
Surface modification and etching of metal films by neutral cluster beam irradiation
(44th International Symposium on Dry Process 2023)

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Education (3)：

- 1999 Kyoto University Graduate School of Engineering Deprtment of Electronic Science and Engineering
- 1996 Kyoto University Graduate School of Engineering Department of Electronic Science and Engineering
- 1994 Kyoto University Faculty of Engineering

Professional career (1)：

Work history (8)：

2024/04 - 現在兵庫県立大学社会価値創造機構副機構長
2020/04 - 現在 University of Hyogo Department of Electronics and Computer Science, Graduate School of Engineering Professor
2021/04 - 2024/03 University of Hyogo
2015/04 - 2020/03 University of Hyogo Department of Electronics and Computer Science, Graduate School of Engineering Associate professor
2007/07 - 2015/03 University of Hyogo Incubation center, Graduate school of engineering, Associate professor

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Committee career (10)：

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Awards (1)：

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