Art
J-GLOBAL ID：201802211152446067   Reference number：18A1698778

Al2O3/n-,p-GaN構造の光熱偏向分光法による評価

Author (12)：
FUKUDA KIYOTAKA

About FUKUDA KIYOTAKA

(物質・材料研究機構)

About 物質・材料研究機構

, 
FUKUDA KIYOTAKA

About FUKUDA KIYOTAKA

(工学院大)

About 工学院大

, 
ASAI YUYA

About ASAI YUYA

(筑波大)

About 筑波大

, 
SEKI KEIYU

About SEKI KEIYU

(法政大)

About 法政大

, 
SANG Liwen

About SANG Liwen

(物質・材料研究機構)

About 物質・材料研究機構

, 
YOSHIGOE AKITAKA

About YOSHIGOE AKITAKA

(原子力発電技術機構)

About 原子力発電技術機構

, 
UEDONO AKIRA

About UEDONO AKIRA

(筑波大)

About 筑波大

, 
ISHIGAKI TAKAMASA

About ISHIGAKI TAKAMASA

(法政大)

About 法政大

, 
ONUMA TAKEYOSHI

About ONUMA TAKEYOSHI

(工学院大)

About 工学院大

, 
YAMAGUCHI TOMOHIRO

About YAMAGUCHI TOMOHIRO

(工学院大)

About 工学院大

, 
HONDA TOORU

About HONDA TOORU

(工学院大)

About 工学院大

, 
SUMIYA MASATOMO

About SUMIYA MASATOMO

(物質・材料研究機構)

About 物質・材料研究機構


Material：
応用物理学会秋季学術講演会講演予稿集(CD-ROM)  (Extended Abstracts. JSAP Autumn Meeting (CD-ROM))

About 応用物理学会秋季学術講演会講演予稿集(CD-ROM)


Volume： 79th  Page： ROMBUNNO.19p-CE-16  Publication year： Sep. 05, 2018 
JST Material Number： Y0055B  ISSN： 2758-4704  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*device structure

About device structure

, 
*alumina

About alumina

, 
compound semiconductor

About compound semiconductor

, 
*gallium nitride

About gallium nitride

, 
photothermal deflection spectroscopy

About photothermal deflection spectroscopy

, 
characterization

About characterization

, 
MOCVD

About MOCVD

, 
substrate (plate)

About substrate (plate)

, 
sapphire

About sapphire

, 
monoatomic layer

About monoatomic layer

, 
hetero-structure

About hetero-structure

, 
ore

About ore

, 
precious stone

About precious stone


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
atomic layer deposition

About atomic layer deposition


JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor-semiconductor contacts with Gr.13-15 element compounds 
(BM03082Y)

About Semiconductor-semiconductor contacts with Gr.13-15 element compounds

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Al2O3

About Al2O3

, 
GaN

About GaN

, 
光熱偏向分光法

About 光熱偏向分光法

, 
評価

About 評価


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