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J-GLOBAL ID：201802214194405930   Reference number：18A1614432

Fabrication and properties characterization of BaSi₂ thin-films thermally-evaporated on Ge (100) modified substrates

Ge(100)修飾基板上に熱蒸着したBaSi_2薄膜の作製と特性評価【JST・京大機械翻訳】

Author (6)： Lien Mai Thi Kieu (Venture Business Laboratory, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan) ,  Lien Mai Thi Kieu (Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan) ,  Lien Mai Thi Kieu (University of Science and Education, The University of Danang, 459 Ton Duc Thang, Hoa Khanh Nam, Lien Chieu, Da Nang, Vietnam) ,  Nakagawa Yoshihiko (Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan) ,  Kurokawa Yasuyoshi (Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan) ,  Usami Noritaka (Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan)
Material： Thin Solid Films
Volume： 663  Page： 14-20  Publication year： 2018 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： The fabrication of orthorhombi...

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Thesaurus term： *thin film ,  optical reflection ,  rhombic system ,  optical property ,  evaporated film ,  *characterization ,  *vacuum deposition ,  wet etching ,  optimization ,  *substrate(plate) ,  etching
Semi thesaurus term： 少数キャリア寿命 ,  結晶品質 ,  ケイ化バリウム , 【Automatic Indexing@JST】

Author keywords (6)： Barium disilicide ,  Silicide semiconductor ,  Thermal evaporation ,  Substrate modification ,  Optical property ,  Minority carrier-lifetime

JST classification (2)： Semiconductor thin films  (BK14040E) ,  Oxide thin films  (BK14050P)

Terms in the title (6)： Ge ,  修飾 ,  熱蒸着 ,  薄膜 ,  作製 ,  特性評価