Art

J-GLOBAL ID：201802215773994046   Reference number：18A1859637

Growth temperatures and the excess chlorine effect of N-Polar GaN growth via tri-halide vapor phase epitaxy

三ハロゲン化物気相エピタクシーによるn極GaN成長の成長温度と過剰塩素効果【JST・京大機械翻訳】

Author (8)： Takekawa Nao (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture & Technology, Koganei, Tokyo 184-8588, Japan) ,  Hayashida Naoto (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture & Technology, Koganei, Tokyo 184-8588, Japan) ,  Ohzeki Daisuke (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture & Technology, Koganei, Tokyo 184-8588, Japan) ,  Yamaguchi Akira (TAIYO NIPPON SANSO Corporation, 10 Ohkubo, Tsukuba 300-2611 Japan) ,  Murakami Hisashi (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture & Technology, Koganei, Tokyo 184-8588, Japan) ,  Kumagai Yoshinao (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture & Technology, Koganei, Tokyo 184-8588, Japan) ,  Matsumoto Koh (TAIYO NIPPON SANSO Corporation, 10 Ohkubo, Tsukuba 300-2611 Japan) ,  Koukitu Akinori (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture & Technology, Koganei, Tokyo 184-8588, Japan)
Material： Journal of Crystal Growth  (J Cryst Growth)
Volume： 502  Page： 7-13  Publication year： 2018 
JST Material Number： B0942A  ISSN： 0022-0248  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： In this paper, we investigated...

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Thesaurus term： polarity ,  *gallium nitride ,  *vapor phase growth ,  high speed ,  growth rate ,  substrate (plate) ,  crystal quality

Author keywords (6)： A1. Growth models ,  A1. Surface structure ,  A1. Mass transfer ,  A3. Hydride vapor phase epitaxy ,  B1. Nitrides ,  B2. Semiconducting III-V materials

JST classification (1)： Semiconductor thin films  (BK14040E)

Terms in the title (7)： 三ハロゲン化物 ,  気相エピタクシー ,  極 ,  GaN ,  成長 ,  成長温度 ,  塩素