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J-GLOBAL ID:201802218128348668   Reference number:18A1008856

微小液滴を用いた大気圧非平衡プラズマ材料プロセス開発

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Volume: 42  Issue:Page: 135-138  Publication year: May. 31, 2018 
JST Material Number: S0175A  ISSN: 0386-2550  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Applications of plasma  ,  Manufacturing technology of solid-state devices 
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