Art

J-GLOBAL ID：201802230761418076   Reference number：18A1805475

Fabrication of a precise ellipsoidal mirror for soft X-ray nanofocusing

軟X線ナノ集束用の精密楕円鏡の作製【JST・京大機械翻訳】

Author (11)： Mimura Hidekazu (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Takei Yoshinori (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Kume Takehiro (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Takeo Yoko (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Motoyama Hiroto (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Egawa Satoru (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Matsuzawa Yusuke (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Yamaguchi Gota (Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan) ,  Senba Yasunori (Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Kishimoto Hikaru (Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Ohashi Haruhiko (Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan)
Material： Review of Scientific Instruments  (Rev Sci Instrum)
Volume： 89  Issue： 9  Page： 093104-093104-7  Publication year： 2018 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： In X-ray focusing, grazing inc...

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Thesaurus term： grazing incidence ,  mandrel ,  energy ,  beam line ,  hard X-ray ,  *focusing ,  *soft X-ray ,  *X-ray ,  chromatic aberration ,  numerical aperture
Semi thesaurus term： X線ミラー ,  SPring-8 ,  高精度 ,  X線集束 ,  *ナノ集束 , 【Automatic Indexing@JST】

JST classification (1)： X-ray instruments and techniques  (BA02060D)

Terms in the title (5)： 軟X線 ,  ナノ集束 ,  精密 ,  楕円 ,  作製