Art
J-GLOBAL ID:201802237564375542   Reference number:18A1112301

Research on effect of parameters in Rotation & Revolution Type Polishing Method

回転・回転型研磨法におけるパラメータの影響に関する研究【JST・京大機械翻訳】
Author (3):
Material:
Volume: 71  Page: 358-363  Publication year: 2018 
JST Material Number: W3527A  ISSN: 2212-8271  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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The Rotation and Revolution Po...
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Grinding  ,  Manufacturing technology of solid-state devices  ,  Manufacturing of glass 
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