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J-GLOBAL ID:201802243344613792   Reference number:18A1017914

パンチ表面のイオンビーム加工がマイクロせん断加工に与える効果

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Volume: 2018  Page: 107-108  Publication year: May. 10, 2018 
JST Material Number: F0694B  ISSN: 0919-1925  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Press working  ,  Manufacturing technology of solid-state devices 
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