Art
J-GLOBAL ID：201802251238160302   Reference number：18A1036841

Influence of annealing atmosphere on crystallization of amorphous Si1-x Ge x thin film by Raman spectroscopy

Raman分光法による非晶質Si_1-xGe_x薄膜の結晶化に及ぼす焼なまし雰囲気の影響【JST・京大機械翻訳】
Author (3)：
Makino Nobuaki

About Makino Nobuaki

(Department of Nanosystem Science, Yokohama City University, 22-2 Seto, Kanazawa-ku, Yokohama 236-0027, Japan)

About Department of Nanosystem Science, Yokohama City University, 22-2 Seto, Kanazawa-ku, Yokohama 236-0027, Japan

, 
Makino Nobuaki

About Makino Nobuaki

(Corporate Manufacturing Engineering Center, Toshiba Corporation, 33 Shin-Isogo-Cho, Isogo-ku, Yokohama 235-0017, Japan)

About Corporate Manufacturing Engineering Center, Toshiba Corporation, 33 Shin-Isogo-Cho, Isogo-ku, Yokohama 235-0017, Japan

, 
Shigeta Yukichi

About Shigeta Yukichi

(Department of Nanosystem Science, Yokohama City University, 22-2 Seto, Kanazawa-ku, Yokohama 236-0027, Japan)

About Department of Nanosystem Science, Yokohama City University, 22-2 Seto, Kanazawa-ku, Yokohama 236-0027, Japan


Material：
Thin Solid Films

About Thin Solid Films


Volume： 658  Page： 61-65  Publication year： 2018 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
All summary is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
The influence of annealing atm...
Register(free) or Log In to access 

Please login to MyJ-GLOBAL to see full information. You also need to select "Display abstract, etc. of medical articles" in your MyJ-GLOBAL account page in order to see abstracts, etc. of medical articles.

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=18A1036841&from=J-GLOBAL&jstjournalNo=B0899A") }}
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*Germanium

About Germanium

, 
*crystallization

About crystallization

, 
*annealing (heat treatment)

About annealing (heat treatment)

, 
*Raman spectroscopy

About Raman spectroscopy

, 
Raman spectrum

About Raman spectrum

, 
Nitrogen

About Nitrogen

, 
*thin film

About thin film

, 
*amorphous state

About amorphous state

, 
amorphous structure

About amorphous structure


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ランダムネットワーク

About ランダムネットワーク

, 
結晶化挙動

About 結晶化挙動

, 【Automatic Indexing@JST】
Author keywords (4)：
Amorphous structure

About Amorphous structure

, 
Crystallization

About Crystallization

, 
Raman spectroscopy

About Raman spectroscopy

, 
Silicon

About Silicon

JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
Raman分光法

About Raman分光法

, 
薄膜

About 薄膜

, 
結晶化

About 結晶化

, 
焼なまし

About 焼なまし

, 
雰囲気

About 雰囲気


Return to Previous Page

TOP

BOTTOM