Art

J-GLOBAL ID：201802251996060334   Reference number：18A1429823

Method to measure the size distribution of massive cluster ion beams using two rotating electric fields

二つの回転電場を用いた大質量クラスタイオンビームのサイズ分布測定法【JST・京大機械翻訳】

Author (7)： Moritani Kousuke (Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, Japan) ,  Hotta Masanao (Office TANDEM L.L.C., 4-2-4 Minamisawa, Higashi-kurume, Tokyo 203-0023, Japan) ,  Nojima Masashi (Research Institute for Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan) ,  Kurumi Satoshi (College of Science and Technology, Nihon University, 1-8-14 Kanda-Surugadai, Chiyoda-ku, Tokyo 101-8308, Japan) ,  Suzuki Kaoru (College of Science and Technology, Nihon University, 1-8-14 Kanda-Surugadai, Chiyoda-ku, Tokyo 101-8308, Japan) ,  Adachi Tatsuya (Ampere, Inc., Saito Bldg., 7-5-3 Nishi-Shinjuku, Shinjuku-ku, Tokyo 160-0023, Japan) ,  Kusanagi Takashi (Ampere, Inc., Saito Bldg., 7-5-3 Nishi-Shinjuku, Shinjuku-ku, Tokyo 160-0023, Japan)
Material： Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
Volume： 432  Page： 1-4  Publication year： 2018 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： We developed a gas cluster ion...

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Thesaurus term： FWHM ,  *ion beam ,  *cluster ,  filter ,  cyclic ,  gas cluster ion beam ,  *Cluster ion beam
Semi thesaurus term： クラスタサイズ ,  質量分解能 ,  *サイズ分布 , 【Automatic Indexing@JST】

Author keywords (5)： GCIB ,  Cluster ion beam ,  Mass filter ,  Rotating electric field ,  Secondary ion mass spectroscopy

JST classification (3)： Electron and ion beams  (BD02030F) ,  Irradiational changes semiconductors  (BK16123E) ,  Channelling,blocking,energy loss of particles  (BK16100J)

Terms in the title (4)： 回転電場 ,  クラスタイオンビーム ,  サイズ分布 ,  測定法