Art
J-GLOBAL ID:201802251996060334   Reference number:18A1429823

Method to measure the size distribution of massive cluster ion beams using two rotating electric fields

二つの回転電場を用いた大質量クラスタイオンビームのサイズ分布測定法【JST・京大機械翻訳】
Author (7):
Material:
Volume: 432  Page: 1-4  Publication year: 2018
JST Material Number: H0899A  ISSN: 0168-583X  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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We developed a gas cluster ion...
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Electron and ion beams  ,  Irradiational changes semiconductors  ,  Channelling,blocking,energy loss of particles 
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