Art

J-GLOBAL ID：201802252618609750   Reference number：18A1103485

Resonant Accelerometers using Electrostatic Potential between the Comb Electrodes

櫛形電極間の静電電位を使った共鳴加速度計

Author (3)： Liu Jiannan (Chiba Institute of Technology) ,  Hoshino Keisuke (Chiba Institute of Technology) ,  Muro Hideo (Chiba Institute of Technology)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 138  Issue： 6  Page： 226-230(J-STAGE)  Publication year： 2018 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： electrode ,  electric potential ,  *accelerometer ,  resonance ,  resonance frequency ,  MEMS ,  electrostatic potential
Semi thesaurus term： resonance frequency ,  comb-type electrode ,  electrostatic potential

Author keywords (10)： Resonant Sensor ,  Electrostatic Potential ,  SOI-MEMS ,  Comb electrode ,  Electrostatic drive ,  Resonant Sensor ,  Electrostatic Potential ,  SOI-MEMS ,  Comb electrode ,  Electrostatic drive

JST classification (1)： Measuring methods and instruments of time,speed,acceleration,angular veloc?  (AD05040K)

Reference (10)：

• (1) S. C. Chang, M. W. Putty, D. B. Hicks, and C. H. Li : “Resonant-bridge two-axis micro accelerometer”, Sensors and Actuators, Vol.A21-A23, pp.342-345 (1990)
• (2) T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith : “Surface- Micromachined Resonant Accelerometer”, 1997 International Conference on Solid-State Sensors and Actuators (Transducers ‘97), pp.16-19 (1997)
• (3) C. Comi, A. Corigliano, A. Merassi, and B. Simoni : “A surface micromachined resonant accelerometer with high resolution”, Proc. 7th European Solid Mechanics Conference, Lisbon, 7-11 September (2009)
• (4) D. Chen, Z. Wu, Lei, Liu, X. Shi, and J. Wang : “An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer”, Sensors, Vol.9, pp.1330-1338 (2009)
• (5) O. Tabata and T. Yamamoto : “Two-axis detection resonant accelerometer based on rigidity change”, Sensors and Actuators A, Vol.75, pp.53-59 (1999)

Terms in the title (4)： 櫛形電極 ,  静電電位 ,  共鳴 ,  加速度計