Art

J-GLOBAL ID：201802259132800107   Reference number：18A0712916

Measurement of nanometer-thick lubricating films using ellipsometric microscopy

エリプソメトリー顕微鏡を用いたナノメートル厚潤滑膜の測定【JST・京大機械翻訳】

Author (6)： Fukuzawa Kenji (Department of Micro/Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan) ,  Sasao Yusuke (Department of Micro/Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan) ,  Namba Katsuya (Department of Micro/Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan) ,  Yamashita Chihiro (Department of Micro/Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan) ,  Itoh Shintaro (Department of Micro/Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan) ,  Zhang Hedong (Department of Complex Systems Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan)
Material： Tribology International  (Tribology Int)
Volume： 122  Page： 8-14  Publication year： 2018 
JST Material Number： E0409B  ISSN： 0301-679X  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： A method based on vertical-obj...

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Thesaurus term： resolving power ,  slip plane ,  thickness measurement ,  *microscope ,  *lubricating film ,  image ,  *ellipsometry ,  lubrication characteristic
Semi thesaurus term： ナノメータ ,  実時間 , 【Automatic Indexing@JST】

Author keywords (5)： Lubricant film ,  Film thickness measurement ,  Nanometer gap ,  Nanotribology ,  Ellipsometry

JST classification (1)： Lubrication in general  (QB02010S)

Terms in the title (4)： エリプソメトリー ,  顕微鏡 ,  厚 ,  潤滑膜