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J-GLOBAL ID：201802263461465450   Reference number：18A0401935

Solution-based process with thermal UV treatment for fabrication of piezoelectric PZT films for an actuator array at temperatures under 450°C

450°C下の温度でのアクチュエータアレイのための圧電PZT薄膜の作製のための熱UV処理を用いた溶液ベースプロセス【Powered by NICT】

Author (5)： Shimura Reijiro (School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa, 923-1292, Japan) ,  Tue Phan Trong (School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa, 923-1292, Japan) ,  Tagashira Yuki (School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa, 923-1292, Japan) ,  Shimoda Tatsuya (School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa, 923-1292, Japan) ,  Takamura Yuzuru (School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa, 923-1292, Japan)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 267  Page： 287-292  Publication year： 2017 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： We report on the fabrication o...

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Thesaurus term： ultraviolet radiation ,  annealing (heat treatment) ,  reduction environment ,  spin coating ,  residual polarization ,  *piezoelectricity ,  coercive electric field ,  preferred orientation ,  low temperature ,  leakage current ,  *lead zirconate titanate ,  *actuator ,  gel ,  perovskite structure
Semi thesaurus term： 低温加工 , 【Automatic Indexing@JST】

Author keywords (5)： PZT ,  Solution process ,  Low temperature ,  Actuator ,  UV/O₃

JST classification (2)： Piezoelectric devices  (NC03110I) ,  Design,manufacturing,and components of robots  (IC04013A)

Terms in the title (8)： アクチュエータ ,  アレイ ,  圧電 ,  PZT ,  薄膜 ,  作製 ,  溶液 ,  プロセス