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J-GLOBAL ID:201802263461465450   Reference number:18A0401935

Solution-based process with thermal UV treatment for fabrication of piezoelectric PZT films for an actuator array at temperatures under 450°C

450°C下の温度でのアクチュエータアレイのための圧電PZT薄膜の作製のための熱UV処理を用いた溶液ベースプロセス【Powered by NICT】
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Volume: 267  Page: 287-292  Publication year: 2017 
JST Material Number: B0345C  ISSN: 0924-4247  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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We report on the fabrication o...
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Piezoelectric devices  ,  Design,manufacturing,and components of robots 

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