Art

J-GLOBAL ID：201802268895495334   Reference number：18A2052322

Green Surface Cleaning in a Radical Vapor Reactor to Remove Organic Fouling on a Substrate

基板上の有機汚染除去のためのラジカル蒸気反応器におけるグリーン表面洗浄

Author (11)： YAMASAKI Ryota (Research Center for Eco-fitting Technology, Kyushu Institute of Technology) ,  YAMASAKI Ryota (Division of Functional Interface Engineering, Department of Biological Functions Engineering, Kyushu Institute of Technology) ,  YAMASAKI Ryota (Advanced Catalytic Transformation Program for Carbon Utilization (ACT-C), Japan Science and Technology Agency (JST)) ,  TAKATSUJI Yoshiyuki (Division of Functional Interface Engineering, Department of Biological Functions Engineering, Kyushu Institute of Technology) ,  MORIMOTO Masayuki (Division of Functional Interface Engineering, Department of Biological Functions Engineering, Kyushu Institute of Technology) ,  MORIMOTO Masayuki (Advanced Catalytic Transformation Program for Carbon Utilization (ACT-C), Japan Science and Technology Agency (JST)) ,  SAKAKURA Tatsuya (Division of Functional Interface Engineering, Department of Biological Functions Engineering, Kyushu Institute of Technology) ,  MATSUO Keishi (Division of Functional Interface Engineering, Department of Biological Functions Engineering, Kyushu Institute of Technology) ,  HARUYAMA Tetsuya (Research Center for Eco-fitting Technology, Kyushu Institute of Technology) ,  HARUYAMA Tetsuya (Division of Functional Interface Engineering, Department of Biological Functions Engineering, Kyushu Institute of Technology) ,  HARUYAMA Tetsuya (Advanced Catalytic Transformation Program for Carbon Utilization (ACT-C), Japan Science and Technology Agency (JST))
Material： Electrochemistry (Web)
Volume： 86  Issue： 6  Page： 355-362(J-STAGE)  Publication year： 2018 
JST Material Number： U1358A  ISSN： 2186-2451  CODEN： EECTFA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *pollutant ,  *cleaning (washing) ,  chemical reactor ,  environmental conservation ,  clean-up method ,  active oxygen ,  *singlet oxygen ,  *Hydroxyl Radical ,  sterilization (disinfection) ,  *surface treatment ,  reaction mechanism ,  surface analysis ,  wafer ,  emission ,  cleaning (purification) ,  polyethylene oxide ,  surface function ,  *organic pollutant ,  Si wafer
Semi thesaurus term： silicon substrate ,  polyethylene glycol ,  surface cleaning

Author keywords (4)： Radical Vapor Reactor ,  Surface Cleaning ,  Reactive Oxygen Species ,  Organic Fouling

JST classification (3)： Other pollutants  (SB05040W) ,  Solid-liquid interface  (CB12050B) ,  Other noncatalytic reactions  (CB06070U)

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Terms in the title (6)： 汚染除去 ,  ラジカル ,  蒸気 ,  反応器 ,  グリーン ,  表面洗浄