About Yokoyama Shuko
About Micro Optics Co.,Ltd., 2-20 Oe-Nakayama-cho Nishikyo-ku, Kyoto, 610-1104, Japan
About Hori Yasuaki
About National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan
About Yokoyama Toshiyuki
About Micro Optics Co.,Ltd., 2-20 Oe-Nakayama-cho Nishikyo-ku, Kyoto, 610-1104, Japan
About Hirai Akiko
About National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan
About Precision Engineering
Please login to MyJ-GLOBAL to see full information. You also need to select "Display abstract, etc. of medical articles" in your MyJ-GLOBAL account page in order to see abstracts, etc. of medical articles.
About interferometer
About reliability(property)
About uncertainty
About measurement accuracy
About optical instrument
About resolving power
About integrated optics
About 評価法
About ヘテロダイン干渉計
About Heterodyne interferometer
About Periodic error
About Uncertainty
About Picometre resolution
About Subnanometre measurement
About Integrated optics
About Measuring methods and instruments of length,area,cross section,volume,angle
About Interferometry and interferometers
About 集積光学
About ヘテロダイン干渉計
About 周期
About 誤差
About 計測
About 評価