Art

J-GLOBAL ID：201802277467977926   Reference number：18A0839943

Stopping power for 4.8-6.8 MeV C ions along [1 1 0] and [1 1 1] directions in Si

Si中の[110]及び[111]方向に沿った4.8~6.8MeV Cイオンの阻止能【JST・京大機械翻訳】

Author (6)： Yoneda Tomoaki (Department of Electrical and Electronic Engineering, National Institute of Technology, Fukui College, Sabae, Fukui-ken 916-8507, Japan) ,  Horikawa Junsei (Department of Electrical and Electronic Engineering, National Institute of Technology, Fukui College, Sabae, Fukui-ken 916-8507, Japan) ,  Saijo Satoshi (Department of Electrical and Electronic Engineering, National Institute of Technology, Fukui College, Sabae, Fukui-ken 916-8507, Japan) ,  Arakawa Masakazu (Department of Electrical and Electronic Engineering, National Institute of Technology, Fukui College, Sabae, Fukui-ken 916-8507, Japan) ,  Yamamoto Yukio (Department of Electrical and Electronic Engineering, National Institute of Technology, Fukui College, Sabae, Fukui-ken 916-8507, Japan) ,  Yamamoto Yasukazu (SR-Center, Ritsumeikan University, Kusatsu, Shiga-ken 525-8577, Japan)
Material： Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
Volume： 425  Page： 1-3  Publication year： 2018 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： The stopping power for C ions ...

Register(free) or Log In to access     To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=18A0839943&from=J-GLOBAL&jstjournalNo=H0899A") }}

Thesaurus term： channeling ,  SIMOX ,  locus ,  measurement accuracy ,  high speed ,  shock (mechanics) ,  *silicon ,  *stopping power ,  *ion ,  convolution ,  approximation method ,  Monte Carlo simulation ,  scattering angle ,  scattering spectra

Author keywords (5)： Stopping power ,  SIMOX ,  Channeling ,  CasP ,  Monte Carlo

JST classification (1)： Channelling,blocking,energy loss of particles  (BK16100J)

Terms in the title (3)： Si ,  イオン ,  阻止能