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J-GLOBAL ID:201802281292953910   Reference number:18A1770521

Investigation on Silicon Oxide Films Grown by Using Silicone Oil and Ozone at Low-Temperature

低温でシリコーン油とオゾンを用いて成長させた酸化けい素膜の研究【JST・京大機械翻訳】
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Volume: 2018  Issue: IC4ME2  Page: 1-4  Publication year: 2018 
JST Material Number: W2441A  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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High quality silicon oxide (Si...
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Graphic and image processing in general 

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