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J-GLOBAL ID：201802282176390612   Reference number：18A0618681

Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

によるシリコンバイアを用いたプラットフォームLSIのクワッドのシーソー電極構造を用いた集積化3軸触覚センサ【Powered by NICT】

Author (10)： Hata Yoshiyuki (Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan) ,  Suzuki Yukio (Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Muroyama Masanori (Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Nakayama Takahiro (Toyota Motor Corporation, 543, Kirigahora, Nishi Hirose-cho, Toyota, Aichi 470-0309, Japan) ,  Nonomura Yutaka (Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan) ,  Chand Rakesh (Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Hirano Hideki (Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Omura Yoshiteru (Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan) ,  Fujiyoshi Motohiro (Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan) ,  Tanaka Shuji (Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 273  Page： 30-41  Publication year： 2018 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： This paper reports a MEMS-on-L...

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Thesaurus term： robot ,  signal processing ,  MEMS ,  semiconductor ,  *LSI ,  surface mount technology ,  *sensor ,  *tactile sensor ,  telecommunication ,  digital method
Semi thesaurus term： 動作原理 ,  力センサ ,  シリアルバス ,  *三軸 ,  *電極構造 , 【Automatic Indexing@JST】

Author keywords (6)： Tactile sensor ,  MEMS-on-LSI integration ,  Quad-seesaw-electrode structure ,  3-axis force sensing ,  Sensor platform LSI ,  Through silicon via

JST classification (2)： Design,manufacturing,and components of robots  (IC04013A) ,  Measuring methods and instruments of force,work load,pressure,friction  (AD05050V)

Terms in the title (6)： プラットフォーム ,  LSI ,  電極構造 ,  集積化 ,  3軸 ,  触覚センサ