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J-GLOBAL ID:201802284098987400   Reference number:18A0952912

Development of epoxy resin polishing pads with the addition of polymer particles

ポリマー微粒子を添加したエポキシ樹脂研磨パッドの開発
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Volume: 84  Issue: 860  Page: ROMBUNNO.17-00505(J-STAGE)  Publication year: 2018 
JST Material Number: U0182B  ISSN: 2187-9761  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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