Art
J-GLOBAL ID:201802289384994043   Reference number:18A0849605

Patterning viertical sidewall using standard aligner

標準的なアライナを用いたVierical側壁のパターン形成【JST・京大機械翻訳】
Author (4):
Material:
Volume: 2018  Issue: MEMS  Page: 475-478  Publication year: 2018 
JST Material Number: W2441A  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
Abstract/Point:
Abstract/Point
Japanese summary of the article(about several hundred characters).
All summary is available on JDreamIII(charged).
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A novel method for patterning ...
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Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
, 【Automatic Indexing@JST】
JST classification (1):
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.

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